FDS型是無需廢水處理、能夠高效安全處理PFCs氣體的干式廢氣處理裝置?？筛咝幚?9.9%以上的PFCs氣體，分解后的含氟廢氣能夠干式固定，所以不會產生廢水，無需進行有毒廢水處理。產品陣容包括：最大流入廢氣量250L/min、PFCs去除效率99%以上（使用250L/min雙筒式)、通過反應槽串行流程設計可大幅提高裝置運行時間的雙筒式設備；方便與傳統干式廢氣處理裝置相互置換的單筒式設備。該裝置也是不具備廢水處理設備和燃料線路的實驗室的最佳選擇。

Model FDS is a dry exhaust abatement system that enables highly efficient and safe treatment of PFC gases with no need for water scrubbing. Capable of highly efficient treatment of at least 99.9% of PFC gases, and with the dry solidification of fluorine series gases after decomposition, no wastewater is generated and there is no need for treatment of toxic wastewater. Dual-cylinder types offer PFC removal efficiency of 99% or more at a maximum gas inflow rate of 250 L/min (in case of 250-L/min dual-cylinder type) and major improvements in system up time due to reactor vessel serial flow design, while a single-cylinder type enables easy replacement of existing dry exhaust abatement systems. Ideal for research laboratories that do not have wastewater treatment equipment or fuel lines.